Material characterization using scanning transmission electron microscopy and electron energy-loss spectroscopy

High-energy-resolution monochromator for aberration-corrected scanning transmission electron microscopy/electron energy-loss spectroscopy.

An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability...

Scanning confocal electron energy-loss microscopy using valence-loss signals.

Finding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliab...

Scanning transmission low-energy electron microscopy

We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing t...

Scanning Transmission Electron Microscopy for Nanostructure Characterization

2D atomic mapping of oxidation states in transition metal oxides by scanning transmission electron microscopy and electron energy-loss spectroscopy.

Using a combination of high-angle annular dark-field scanning transmission electron microscopy and atomically resolved electron energy-loss spectroscopy in an aberration-corrected transmission electron microscope we demonstrate the possibility of 2D atom by atom valence mapping in the mixed valence compound Mn3O4. The Mn L(2,3) energy-loss near-edge structures from Mn2+ and Mn3+ cation sites ar...